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Ceramic heating elements

made of hotpressed silicon nitride ceramic


Hot plates

for industrial applications

Products / Ceramic heating elements / Hot plates

Hot plates


Description

Ceramic hot plates made of silicon nitride can be produced with an outer diameter of 400 mm. Within this diameter any rectangular shape, customized shape or opening is possible. A typical height of the plates is 5 mm. The special properties and low mass of the ceramic material allow fast heating rates, uniform temperature distribution and outstanding precision in control. In comparison to metal the surface of ceramic material stays flat due to its low thermal expansion even when operated with fast changes in temperature. The high strength of hot-pressed silicon nitride guarantees high stress resistance (e. g. with high pressure loads) and excellent wear resistance. We provide hot plates for operating in the open air at temperatures up to 500 °C. Temperatures up to 1 000 °C could be achieved by developing specific technical solutions. However with continuous operation at temperatures > 900 °C a limited service life of 2 500 operating hours is to be expected, whereas with operation under high vacuum even at 1 000 °C the wear and tear is very low.


Customized design

Our in-house designs make any modification in size, configuration, or performance simple and convenient. Mounting-bracket holes and bores for temperature sensors can be added to the design. Laser-cut vacuum grooves can be added as well. Our hot plates come already flat ground, however they can be ground further up to a flatness of < 10 μm to meet specific requirements. A variety of shapes formed to the contour of the product or tool to be heated are possible as well. Furthermore, our ceramic heating conductor with its customized design allows the integration of several heating zones. Devices to compensate for heat loss and an internal test lead for temperature measurement can be easily built in. For operating in high vacuum at up to 1 000 °C a pin contact can be supplied.


Range of products

This is only a small selection from our product portfolio. For other variants please contact us with our product request form.

Dimensions Heated area Tmax
Ø 60 x 80 x 4.0 mm Ø 45 x 4.0 mm 800 °C
Ø 60 x 93.9 x 5.0 mm Ø 60 x 5.0 mm 1 000 °C
Ø 100 x 7.0 mm Ø 100 x 7.0 mm 500 °C
160 x 100 x 4.5 mm 100 x 100 x 4.5 mm 800 °C

Advantages

Your advantages:

  • You have superior temperature uniformity and flatness of the hotplate
  • High mechanical strength ensures long lifetime even when stressed by pressure and temperature cycling
  • The hotplates can be custom made and exactly adapted to your requirements
  • You can operate the heaters in air, high vacuum or inert gas up to 1 000 °C

Areas of application

  • semiconductor processing systems (e. g. die bonders)
  • coating systems, evaporators
  • soldering systems
  • vacuum technology
  • packaging machines
  • plastic technology
  • medical technology
  • machine-building
  • presses
  • R&D - laboratory equipment, measuring and testing equipment, reactors
  • tool heating